Topic - FDC

Title Processes Material Chamber Principle Chamber Hardware Supplier Topic  
Baratron faultGate etch ICPTCP®LAMFDC
Instable chamber pressure OxideMERIE AMATFDC
E-chuck faultTrenchCrystal SiMERIEHARTAMATFDC
Particle in a CVD processCVDOxideHDP-CVDUltimaAMATFDC
Parasitic plasma in He feedthroughVIA etchOxideMERIEMxP+AMATFDC
Arcing at e-chuck  MERIE  FDC
Instable process - different levels in collision rateHard Mask OpenOxide Nitride SandwichDual FrequencySCCM OxideTELFDC
Analysis of DT Etch Plasma Problems using a SEERS Plasma SensorTrenchCrystal SiICPDPSAMATFDC