Material - Polysilicon / a-Si

Title	Processes	Material	Chamber Principle	Chamber Hardware	Supplier	Topic
Control of wet clean cycle by plasma parameters of dry clean		Polysilicon / a-Si	RIE			Clean / Conditioning
Instable etch rate in lower pressure range	Stack	Polysilicon / a-Si	ICP	TCP®	LAM	Process Performance
Product mix issue depending on chamber dedication	Stack	Polysilicon / a-Si	ICP		LAM	Development
Open area influences the process	Gate etch	Polysilicon / a-Si	ICP	TCP®	LAM	Process Stability
Quality Management in large Area PECVD	CVD	Polysilicon / a-Si	PE-CVD	AKT	AMAT	Process Performance
Uniformity and Process transfer	CVD	Polysilicon / a-Si	PE-CVD	AKT	AMAT	Development
PECVD Process Monitoring In Thin Film Silicon Solar Cell Manufacturing	CVD	Polysilicon / a-Si	PE-CVD	AKT	AMAT	Process Stability