Processes - Hard Mask Open

Title	Processes	Material	Chamber Principle	Chamber Hardware	Supplier	Topic
Conditioning optimization	Hard Mask Open	Oxide Nitride Sandwich	Dual Frequency	SCCM Oxide	TEL	Clean / Conditioning
Arcing indicated by collision rate	Hard Mask Open	Oxide Nitride Sandwich	Dual Frequency	SCCM Oxide	TEL	Maintenance
Instable process - different levels in collision rate	Hard Mask Open	Oxide Nitride Sandwich	Dual Frequency	SCCM Oxide	TEL	FDC