Title | Processes | Material | Chamber Principle | Chamber Hardware | Supplier | Topic | |
---|---|---|---|---|---|---|---|
Stabilization of PECVD process by dry clean | CVD | Oxide | HDP-CVD | Speed | Novellus | Process Stability | ![]() |
Arcing detection and root cause analysis in low pressure PECVD | CVD | Oxide | PE-CVD | Speed | LAM | Arcing/Breakdown | ![]() |