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Events| Title | Processes | Material | Chamber Principle | Chamber Hardware | Supplier | Topic | |
|---|---|---|---|---|---|---|---|
| Chamber Matching of ICP Etch Chambers using RF Equipment Model | STI | ICP | DPS | AMAT | Chamber Matching |  | |
| Investigation of STI-Etch Process with Hercules Sensor | STI | Resist | ICP | 2300 | LAM | Clean / Conditioning | |