Title | Processes | Material | Chamber Principle | Chamber Hardware | Supplier | Topic | |
---|---|---|---|---|---|---|---|
Chamber matching at Sputter Clean Chamber | Sputter etch | Oxide | ICP | CSE / HSE | SPTS | Chamber Matching | |
Maintenance and Optimization of Aviza HSE Sputter Etch Chmaber | Sputter etch | Metal | ICP | CSE / HSE | SPTS | Process Stability |