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Events| Title | Processes | Material | Chamber Principle | Chamber Hardware | Supplier | Topic | |
|---|---|---|---|---|---|---|---|
| Favorable working point and process improvement | Metal | ICP | TCP® | LAM | Development |  | |
| MFC fault detection | Metal | ICP | TCP® | LAM | Process Stability | | |
| Maintenance and Optimization of Aviza HSE Sputter Etch Chmaber | Sputter etch | Metal | ICP | CSE / HSE | SPTS | Process Stability | |
| Process Stability in Photo Mask Manufacturing | Metal Etch | Metal | ICP | DPS | AMAT | Process Stability | |