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Events| Title | Processes | Material | Chamber Principle | Chamber Hardware | Supplier | Topic | |
|---|---|---|---|---|---|---|---|
| Arcing in gas distribution | MERIE | MxP | AMAT | Maintenance |  | ||
| Magnetic field failure | MERIE | MxP | AMAT | Maintenance | | ||
| Influence of shadow ring material | Nitride / Oxinitride | MERIE | MxP | AMAT | Clean / Conditioning | |