Chamber Hardware - HART

Title Processes Material Chamber Principle Chamber Hardware Supplier Topic  
E-chuck faultTrenchCrystal SiMERIEHARTAMATFDC
Implementation of in-situ Measurement Techniques for Plasma ProcessingTrench Dual FrequencyHARTAMATProcess Stability
Improved chamber temperature stabilityTrenchOxide Nitride SandwichMERIEHARTAMATClean / Conditioning
De-conditioning by test waferTrenchCrystal SiMERIEHARTAMATClean / Conditioning
Chamber matchingTrenchCrystal SiMERIEHARTAMATChamber Matching
Improve of warm-upTrenchCrystal SiMERIEHARTAMATClean / Conditioning