Material - Crystal Si

Title Processes Material Chamber Principle Chamber Hardware Supplier Topic  
Process out of spec by corroded gas ringTrenchCrystal SiICPTCP®LAMClean / Conditioning
Wet clean and conditioning checkTrenchCrystal SiMERIEHART TSAMATClean / Conditioning
E-chuck faultTrenchCrystal SiMERIEHARTAMATFDC
Hard mask erosionTrenchCrystal SiMERIE AMATProcess Performance
De-conditioning by test waferTrenchCrystal SiMERIEHARTAMATClean / Conditioning
Chamber matchingTrenchCrystal SiMERIEHARTAMATChamber Matching
Improve of warm-upTrenchCrystal SiMERIEHARTAMATClean / Conditioning
E-H-Mode transition and its detection in SF6 plasmaTrenchCrystal SiICPDPSAMATProcess Stability
Analysis of DT Etch Plasma Problems using a SEERS Plasma SensorTrenchCrystal SiICPDPSAMATFDC