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    Hercules®:
    SMART SENSOR FOR PROCESS DEVELOPMENT and ROBUST SENSOR FOR QUALITY CONTROL

    Plasma Metrology System Hercules® Applications
    • In-situ Plasma Metrology System for etch and CVD processes (for example: semiconductor manufacturing)
    • Passive and real-time measurement of plasma key parameters (electron density and/or electron collision rate) as an indicator for the process plasma
    • Plasma Metrology System Hercules® consists of
      • Sensor
      • High-speed digitizer to convert sensor signal into digital data
      • Software for data analysis and visualization
    • Software interface for communication with APC systems
    • Process development and transfer
    • Fault Detection and Classification (FDC)
    • Chamber matching
    • Process control
    • Chamber conditioning after wet clean
    • Plasma stability improvement
    • Matching through absolute parameters
    • Quality management
    • Process and tool qualification
    • Preprocess issues
    • Yield improvement


    Sensors heads Specifications
    • Sensors kits for mainstream plasma tools in semiconductor manufacturing
    • Surface layer and alay as liner and GDP
    • Easy setup and installation as a part of chamber wall
    • Non-instrusive (Sensor has no affect on plasma and/or process conditions)
    • A large range of sensors and their specifications please find in the SENSOR CATALOG.
    • Frequency: 10 MHz - 70 MHz, also dual frequency, depends on model (SEERS or NEED).
    • Pressure range depends on gas, reactor geometry, and RF power
    Hercules® Setup Software and Data Visualization
    • Installation and setup is simple, and no calibration is neeeded.
    • Install the sensor. Installation does not require drilling!
    • Connect sensor to Hercules digitizer
    • Configure softare by setting a few tool specific parameters in the ini-file
    • Turn-on power and system boots automatically
    • Plasma parameters will be generated as soon as sensor signal exceeds minimum threshold.
    • Note:
      Plasmetrex will provide onsite technical support for initial setup and system start-up.