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PRODUCT GUIDE
Hercules
®
at a Glance
Semiconductor Plasma Process Sensor
Hercules
®
PMX 500/1000
Hercules
®
C 500/1000
Hercules
®
N 250
Consulting Overview
Total Process Control Solution
PLASMA PROCESS CONTROL
Plasma Control Concept
Process Control
Plasma Key Parameters
Plasma Metrology
Hercules
®
Product
Hercules
®
Principle
Hercules
®
Sensors
Main Applications
Hercules
®
Rent-to-buy
Hercules
®
Road Map and History
Data Handling
Data Analysis by HercViewer or HercLotViewer
Data Coupling
Data Management by Hercules
®
Master
EXPERIENCE & TRAINING
Training Concept
Plasma School
Plasma School for Semiconductor Manufacturing
Plasma Technology in Solar Cell Manufacturing
Radio Frequency Technology for Plasma Applications
RF TECHNOLOGY and PROCESS SERVICES
RF Chamber Matching
Spare Part Management
Uniformity Improvement
Large Area Uniformity Simulation
REFERENCES
Tool and Process
Hercules
®
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© 2023 Plasmetrex GmbH
PARTNERS
Azbil
Corporation
Leibniz-Institut für Plasmaforschung und Technologie e.V.
PVcomB - Kompetenzzentrum Dünnschicht- und Nanotechnologie für Photovoltaik Berlin
Christian-Albrechts-University Kiel
Institut für Experimentelle und Angewandte Physik
AG Plasmatechnologie
Munich University
of Applied Sciences
Ruhr-University-Bochum
Faculty of Electronics and Information Technology
Silicon Saxony e.V
Northeast Advanced Technological Education Center
Hudson Valley
Community College
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