AVAILABLE SENSORS

Hercules^® uses a special sensor in a coaxial geometry (50 Ohm) inserted into the wall (flange) of the recipient as a virtual part of the wall and does not influence plasma. Calibration depending on the sensor position is not necessary.

Sensors:

• easy setup and installation for different tools.
• insensitive to deposition insulating layers (polymers).
• passive and removable internal plasma parameters.

The sensor is specifically depending on the etch and deposition tool.

Plasmetrex GmbH delivers sensors for

APPLIED MATERIALS^® :

• MxP™ , eMxP+™ , eMAX™ , SUPER e™,HART™,
  DPS™ 200 mm and 300 mm, CVD Ultima

LAM^®:

• TCP^® 9X00 SE, TCP^® 9X00 PTX, 2300™

Novellus:

• SPEED

Standard flanges:

• DN16, DN25, DN40 KF as well as CF
  (other sensors for special etch tools on request).