COMPANY

Plasmetrex GmbH - plasma is our know-how.

We see ourselves not only as a manufacturer and supplier of plasma diagnostics,
but also as a service provider and problem solver around the subject 'plasma'.

The ASI Advanced Semiconductor Instruments GmbH were taken over by the Plasmetrex GmbH per October 1^st 2006.

Business segments

• Plasma metrology equipment for etch and deposition in semiconductor manufacturing - High-end plasma metrology
• Photovoltaic and display manufacturing - Large chamber plasma control
• Surface treatment - Low cost plasma control

Service and consulting

• Qualification of process and maintenance personnel
  • Plasma School for Semiconductor Manufacturing
  • Plasma Technology in Solar Cell Manufacturing
  • Radio Frequency Technology for Plasma Applications
• Process, equipment, and metrology consulting
  • RF chamber matching
  • Uniformity improvement
  • Non-uniformity simulation for a-Si layer thickness