• PRODUCT GUIDE
    PLASMA PROCESS CONTROL
    EXPERIENCE & TRAINING
    RF TECHNOLOGY and PROCESS SERVICES
    REFERENCES
    OTHER

    HERCULES® RENT-TO-BUY

    Technical Commercial
    • Evaluation project preparation:
    • Definition of goals (save condi wafers, virtual metrology, FDC ...)
    • Creating Strategy using Application Guide and Data Base
    • Defining milestones and man power requested from customer and supplier
    • Expected benefit and commercial issues
    • Rent-to-buy agreement
      (Sensors are consumables and must be purchased separately by customer.)
    • Project phase I:
    • First test based on DOE
    • Establishing data interface
    • Get base line (1 - 3 wet clean cycles, ...)

    • Project phase II:
    • Collect fault patterns, search for root causes
    • Test of new procedures (modified conditioning, ...)
    •  Evaluation sucessful
    • Project phase III:
    • Define BKM
    • Create action guidelines
    • Calculate benefit
    • Final report:
    • Presentation
       
    • Purchase order, rental fee can be applied