Contents:

Examples of Contents:

1. AC Theory

• Basic electric values
• Ohmic resistance
• Imaginary unit
• Impedance, inductance, and capacitance
• Fundamental laws
• Voltage driver
• Low and high pass
• RF power transmission

2. Coaxial Cable Theory

• Ideal cables
• Termination
• Real cables, examples, key parameters
• Signal delaySkin effect

3. RF - Contacts and Connectors

• Contact resistance
• Connector geometries
• Common adapters and plugs

4. Matching Principles and Types

• Maximum power into load - DC, RF
• Impedance matching
• Matching types
• Real matchboxes and loads
• Resonance, LC Oscillation circuit
• Practical matching equations
• Fixed matching
• Examples
• VHF Matching

5. Real Complete System

• Equivalent circuit of the RF plasma
• E-Chuck and equipment  circuit
• Power transmission and losses

6. RF Metrology

• Accuracy of measurement
• Voltage and current
• Directional coupler
• VI-probe

7. Additional Power Coupling Methods

• Inductive coupling
• Generation of RF-oscillations
• Electro-magnetic waves
• Microwaves, ECR

8. Waves and Reflections

• Wave propagation 
• Reflection
• Standing waves
• Grounding, shielding, EMC

Experiments:

• Capacitors of high RF power
• Wave propagation in cables
• Damping and RF power loss in cables
• Cables and connectors for plasma equipments
• High voltage RF probes
• RF current probes