HERCULES® N smartM
ROBUST SENSOR for MANUFACTURING CONTROL |

| Quality Management by Process Control |
Product:
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- Hercules® smartM N (10 - 40 MHz)
no DC bias or RF peak voltage measurement point required.
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Applications: | - Routine manufacturing control
- Quality control
- Faults Detection and Classification
- Conditioning (seasoning) control
- Chamber matching
- Virtual Metrology
- Pre-process fault detection
- Product monitoring
- Maintenance
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Parameters: | - Plasma resistivity, normalized
- Resonance frequency
- Unformity edge
- RF current (1st harmonic)
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Measurement range: | - Resitivity: 0.01 ... 10
- Resonance frequency: 10 ... 50 MHz
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Pressure range: | - Depends on gas, reactor geometry, and RF power
- Lower limit: typical 50 Pa (380 mTorr)
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Pre-conditions: | - Cylindrical chamber geometry
- Flange above wafer in process position, not in shadow of other parts
- Well grounded chamber wall and liner
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Chambers: | |
Model: | - Non-iterative NEED algorithm with low pressure extension
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Flexible and small: | - appr. 4 kg
- H: 210 mm, D: 250 mm, W: 210 mm
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Data analysis and process control: | |
Interface: Subject to technical alternations!
| - SEMI 54.24 (Modbus® TCP)
- Lam® Plug and Play (optional)
- SECS/HSMS (optional via Hercules® Master)
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