TOOL AND PROCESS REFERENCES

Supplier Tool Process
Applied Materials® Mark II™ , MxP™ , MxP+™ , eMxP+™ , Super e™ , eMax™ oxide, contact hole, via hole, gate contact mask open, trench
  DPS™ , DPS+™ , DPS II gate contact (poly), recess (Si)
  HART™ , HART TS(+) 200 mm, 300 mm
deep trench
  Ultima 200 mm insulator deposition
Lam / Novellus

Speed 200mm, 300 mm, Producer 300 mm,

Sequel 200 mm

dielectric deposition
Trikon Omega  
Lam Research® TCP® 9400 SE, TCP® 9400 PTX gate contact (poly), trenching, STI, nitride
  TCP® 9600 SE, TCP® 9600 PTX (Al)  
 

2300 Versys® incl. Kiyo™ Star Kiyo™ 45,

200 mm & 300 mm

gate contact (poly), metal (Al), carbon
TEL IEM™ Oxide  
  SCCM™ poly 200 mm  
 

SCCM™ oxide 300 mm

Vesta™

Vigus

RLSA

 
Oxford Instruments ICP etch
PlasmaTherm (now Unaxis) PlasmaTherm 790 etch