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    DATA MANAGEMENT by HERCULES® MASTER

    Main Functionality:
    The Hercules® Master is the standard Graphical User Interface (GUI) of Hercules® Plasma Monitoring Systems for configuration and data visualization. It can run on any PC with network connection to the Hercules® systems and can provide also additional features as a process data base.

    The Hercules® Master collects data from various Hercules® sensors, up to 6 chambers.

    Main Applications:
    • Process control through plasma parameters
    • Chamber matching
    • Fault detection by plasma parameters
    • Optimization of conditioning
    • Process development

    Extensions:
    HSMS/SECS interface:
    • The HSMS/SECSII interface enables the data exchange with the fab host. It provides logistical data (Lot Id, Wafer Id, recipe, etc.) from the host to Hercules® and sensor data (plasma parameter) to the host. 
    • This option can be also used for the connection of Hercules® with a fab-wide FDC/SPC or APC solution.
    Process Data Base (storage module):
    • The storage module can be installed on Hercules® or on a separate PC connected to Hercules via TCP.
    • The process data base stores plasma data in a file based data base.
    • The sensor data can be selected by the logistical data (if available). 

    The Master includes Plasmetrex' superior off-line data analysis software
    HercView for detailed lot control and HercLotView for long term process stability.
    Effective software for collecting data to meet Standards of Quality Management, for example ISO/TS 16949.