ONE CHAMBER: CHAMBER HARDWARE

Process faults at one chamber often indicate hardware problems.

REASON	DESCRIPTION
Corrosion Wear issues Spare parts	Corrosion, installation spare parts, or other wear issues may lead to process faults. Example: If a process was developed with an improperly calibrated MFC, replacing it with a correctly calibrated MFC may lead to unexpected process faults. A frequent reason for process instabilities is arcing. Arcing is caused by leakage currents, which are the result of dielectric breakdown and subsequent electrical discharge of an insulated surface.

REASON

DESCRIPTION

Corrosion
Wear issues
Spare parts

Corrosion, installation spare parts, or other wear issues may lead to process faults.

Example:
If a process was developed with an improperly calibrated MFC, replacing it with a correctly calibrated MFC may lead to unexpected process faults.

A frequent reason for process instabilities is arcing. Arcing is caused by leakage currents, which are the result of dielectric breakdown and subsequent electrical discharge of an insulated surface.