Upgrading tool software may lead to process deviations. Sometimes, a bug fix may introduce new bugs with unwanted consequences (e.g., recipe modifications).
Other example: Fixing a bug in the MFC calibration routine may lead to process excursions.

A software update is usually necessary to:
  • Add new or additional hardware components (sensors, MFC, wafer handler, ECS, etc.)
  • Improve tool and/or software performance
If all chambers of the same tools exhibit process excursions, check the tool software and find out if an update is available. Make sure you create a bachup copy of the current software before installing the new one.