ONE CHAMBER: CHAMBER-SPECIFIC RECIPE
Chamber-specific recipes are used for sensitive processes with narrow
product specs to compensate for chamber deviation. The recipe can be fine-tuned for
each chamber by adjusting gas flow, step length (for etch
rate), and RF power.
If these conditions change, the chamber-specific recipe can cause a process fault.
Potential reason for chamber-fine recipes:
- RF-circuit (aging contacts, grounding, ..),
- Chamber surface (aging, ..),
- Wear of mechanical tool parts (pumps, valves, ...).