ONE CHAMBER: CHAMBER-SPECIFIC RECIPE

Chamber-specific recipes are used for sensitive processes with narrow product specs to compensate for chamber deviation. The recipe can be fine-tuned for each chamber by adjusting gas flow, step length (for etch rate), and RF power.

If these conditions change, the chamber-specific recipe can cause a process fault.

Potential reason for chamber-fine recipes:

• RF-circuit (aging contacts, grounding, ..),
• Chamber surface (aging, ..),
• Wear of mechanical tool parts (pumps, valves, ...).