FUNDAMENTAL PAPERS

2008

A reduced model for etch rate prediction based on plasma parameters
Michael Klick, Ralf Rothe, Lutz Eichhorn, Plasmetrex GmbH
AVS 55th International Symposium & Exhibition Boston, MA, October, 2008.

Skin effect in a small symmetrically driven capacitive discharge
Thomas Mussenbrock, Torben Hemke, Dennis Ziegler, Ralf Peter Brinkmann, Michael Klick – Ruhr University Bochum, Plasmetrex GmbH,
Plasma Sources Sci. Technol. 17 (2008) 025018.

Nonlinear dynamics of dual frequency capacitive discharges: A global model matched to an experiment
Dennis Ziegler, Thomas Mussenbrock, Ralf Peter Brinkmann – Ruhr University Bochum,
Plasma Sources Sci. Technol. 17 (2008) 045011.

Enhanced of ohmic and stochastic heating by resonance effects in capacitive radio frequency discharges: A theoretical approach
T. Mussenbrock, R. P. Brinkmann, M. A. Lieberman, A.J. Lichtenberg, E. Kamamura – Ruhr University Bochum, University of California,
Phys. Rev. Lett. 101, 085004(2008).

Stochastic heating in asymmetric capacitively coupled RF discharges
J. Schulze, B. G. Heil, D. Luggenhölscher, R. P. Brinkmann, U. Czarnetzki – Ruhr University Bochum
J. Phys. D:Appl. Phys. 41(2008) 195212.

2007

On the skin effect in symmetrically driven rf discharges
T. Mussenbrock, T. Hemke, D. Ziegler, R. P. Brinkmann, M. Klick – Ruhr University Bochum, Plasmetrex GmbH
28th ICPIG, 2007, Prague, Czech Republic

Nonlinear plamar dynamics in capacitive radio frequency discharges
T. Mussenbrock, R. P. Brinkmann – Ruhr University Bochum
Plasma Sources Sci. Technolog. 16(2007), 377

Response to "Comment on 'A nonlinear global model of a dual frequency capacitive discharge'"
T. Mussenbrock, D. Ziegler, R. P. Brinkmann – Ruhr University Bochum
Phys. Plasmas 14(2007), 014702

Nonlinear high frequency behavior of dual frequency capacitive discharges
D. Ziegler, E. Semmler, T. Mussenbrock, R.P. Brinkmann, P. Awakowicz, A. von Keudell, – Ruhr University Bochum
Appl. Phys. Lett. 17 045011(2008)

2006

Nonlinear electron resonance heating in capacitive radio frequency discharges
T. Mussenbrock and R. P. Brinkmann – Ruhr University Bochum
Appl. Phys. Lett. 88(2006), 151503 

A nonlinear global model of a dual frequency capacitive discharge
T. Mussenbrock, D. Ziegler, R.P. Brinkmann – Ruhr University Bochum
Phys. Plasmas 13(2006), 083501 

Self-excitation of the plasma series resonance in radio-frequency discharges: An analytical description
U. Czarnetzki, T. Mussenbrock, R.P. Brinkmann – Ruhr University Bochum
Phys. Plasmas 13(2006), 123503 

Microscopic approach to an equation for the heat flow between wafer and E-chuck
M. Klick, M. Bernt – Plasmetrex GmbH
J.VAC.SCI.TECHNOL.B24(2006)6, 2509

Please contact us via mail in case of interest.

2005

Electron heating in capacitively coupled discharges and reactive gases
G. Franz, et al. – Munich University of Applied Sciences
J.VAC.SCI.TECHNOL.A23(4)2005,917

Please contact us via mail in case of interest.

2003

Plasma monitoring under industrial conditions for semiconductor technologies
M. Klick, ASI GmbH
Invited talk at AVS 50th International Symposium, 2003, Baltimore, USA

2000

An improved model of the SEERS diagnostic method
R. P. Brinkmann, Ruhr University Bochum
Plasma Science, 2000. ICOPS. IEEE Conference Record, 27th IEEE International Conference on Plasma Science

1999

Influence of Excitation Frequency on Plasma Parameters and Etching Characteristics of RF Discharges
M. Klick – ASI GmbH, et al.
Surface and Coatings Technology 116–119 (1999), 468-471

1998

Innovative Plasma Diagnostics and Control of Process in Reactive Low-Temperature Plasmas
M. Klick – Adolf-Slaby-Institut GmbH, et al.
Surface and Coatings Technology 98 (1998), 1395-1399

1997

Plasma Diagnostics in RF Discharges Using Nonlinear and Resonance Effects
M. Klick – Adolf-Slaby-Institut GmbH, et al.
Jpn. J. Appl. Phys. 36, Part I (1997)7B, 4625-4631