APPLICATION GUIDE APPLICATION DATA BASE SENSOR CATALOG DOWNLOAD
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PRODUCT GUIDE
Hercules® at a Glance
Semiconductor Plasma Process Sensor
Consulting Overview
Total Process Control Solution
PLASMA PROCESS CONTROL
Plasma Control Concept
Plasma Metrology
Data Handling
EXPERIENCE & TRAINING
Training Concept
Plasma School
RF TECHNOLOGY and PROCESS SERVICES
RF Chamber Matching
Spare Part Management
Uniformity Improvement
Large Area Uniformity Simulation
REFERENCES
Tool and Process
Hercules® Customers
Experience & Training
Partners
FAQs
Impressum
Company
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EXPERIENCE & TRAINING REFERENCES

AMD Micron Technology Inc.
Infineon Texas Instruments
AMD FAB36 LLC & Co. KG
AMD Saxony LLC & Co. KG
Micron Technology Inc. Infineon Technologies Dresden GmbH Co. OHG Texas Instruments
Deutschland GmbH
Osram RENESAS Micronas Holding GmbH United Monolithic Semiconductors GmbH
OSRAM Opto Semiconductors GmbH RENESAS Semiconductor Europe (Landshut) GmbH Micronas GmbH United Monolithic Semiconductors GmbH
Taiwan Semiconductor Manufacturing Company Limited X-FAB Semiconductor Foundries AG Atmel Global Foundries
Taiwan Semiconductor Manufacturing Company Limited X-FAB Semiconductor Foundries AG Atmel Corporation Global Foundries
AMTC Dürr AG Bosch
AMTC Advanced Mask Technology Center GmbH & Co. KG Masdar PV GmbH Robert Bosch GmbH

Dürr AG Aviza Technology GmbH FHR Sentech
Dürr AG Aviza Technology GmbH FHR Anlagenbau GmbH SENTECH Instruments GmbH
mattson Applied Ceramics ADL Analoge und Digitale Leistungselektronik GmbH
CIS
Mattson Thermal Products GmbH Applied Ceramics Europe AG ADL Analoge und Digitale
Leistungselektronik GmbH
CiS Institut für Mikrosensorik gGmbH

FhG-IPMS IHP Ruhr-University-Bochum Christian-Albrechts-University
Fraunhofer Institut Photonische Mikrosysteme IPMS IHP GmbH - Innovations for High Performance Microelectronics Ruhr-University-Bochum
Faculty of Electronics and Information Technology
Christian-Albrechts-University Kiel
Humboldt University Berlin Technical University Berlin

Humboldt-University Berlin Technical University Berlin