APPLICATION GUIDE APPLICATION DATA BASE SENSOR CATALOG DOWNLOAD
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PRODUCT GUIDE
Hercules® at a Glance
Semiconductor Plasma Process Sensor
Consulting Overview
Total Process Control Solution
PLASMA PROCESS CONTROL
Plasma Control Concept
Plasma Metrology
Data Handling
EXPERIENCE & TRAINING
Training Concept
Plasma School
RF TECHNOLOGY and PROCESS SERVICES
RF Chamber Matching
Spare Part Management
Uniformity Improvement
Large Area Uniformity Simulation
REFERENCES
Tool and Process
Hercules® Customers
Experience & Training
Partners
FAQs
Impressum
Company
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PROCESS CONTROL

Plasmetrex provides support for your complete process control loop from process metrology issues and data analysis to process improvement or problem solution.
Process Control Strategy
Etching
Deposition
Hercules®
Key parameters
analysis
Process and hardware check
Pre-process check
Process control needs real-time data.
Tool data show the tool properties.
Plasma properties reflect process properties.