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PLASMA TECHNOLOGY IN SOLAR CELL MANUFACTURING

This course provides knowledge on plasma principles and capability of photovoltaic manufacturing technologies.

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Location: Courses at the Customer Site 

  • 10 - 20 participants
  • Courses on demand
  • Technican and engineer courses

Please contact us


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Location: Courses in Berlin

  • Plasma Technology in Solar Cell Manufacturing

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Duration:

  • Plasma Technology in Solar Cell Manufacturing 
    • Plasma Physics Fundamentals: 6 hours
    • Plasma Deposition Tools: 2 hours
    • PECVD of Amorphous and Microcrystalline Silicon Thin Films: 2 hours

The course includes:

MODULE: PLASMA PHYSICS FUNDAMENTALS

Plasma Physics Fundamentals

  • Elementary plasma physics
  • DC discharge
  • RF discharge
  • CCP - Capacitively Coupled Plasma
  • Overview: ICP / TCP - Inductively Coupled Plasma
  • RF power in plasma
  • Uniformity issuses in large area plasmas
  • Plasma process control in Fab
  • Methods of plasma diagnostics
Fundamentals

MODULE: EQUIPMENT

Plasma Deposition Tools

Plasma Deposition Tools

  • Sputter deposition
  • Plasma Enhanced Vapor Deposition
  • Cleaning procedure with NF3
  • Cost control by quality and process management
Deposition

MODULE: PECVD of Amorphous and Microcrystalline Silicon Thin Films*

Module: PECVD
  • Elementary Processes in Silane/Hydrogen Plasmas
  • Fundamentals of Plasma-Surface Interactions
  • Film Growth Control
  • Plasma Diagnostics and Monotoring of SiH4 / H2
  • Outlook: Future Concepts
PECVD
PVComB
* This module is developed in cooperation with PVcomB.