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AEC/APC Symposium XXIV and ISMI Symposium on Manufacturing Effectiveness, Renaissance Austin Hotel, Austin, Texas, USA, November 2010
 
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Hercules® at a Glance
Semiconductor Plasma Process Sensor
Photovoltaics Plasma Process Sensor
Total Process Control Solution
PLASMA PROCESS CONTROL
Plasma Control Concept
Plasma Metrology
Data Handling
EXPERIENCE & TRAINING
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RF Chamber Matching
Uniformity Improvement
Large Area Uniformity Simulation
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2010 © Plasmetrex GmbH

EVENT CALENDAR

Next Event Last Events
  • AEC/APC Symposium XXII
    Renaissance Austin Hotel, Austin, Texas
    November 3-4, 2010
  • ISMI Symposium on Manufacturing Effectiveness
    Renaissance Austin Hotel, Austin, Texas
    November 3-4, 2010

  • Radio frequency Technology for Plasma Application
    Dorint-Hotel Berlin-Adlershof
    Berlin, Germany
    November, 2010
    plasmetrex.com/rft.html,courses
    depending on request

  • Plasma School for Semiconductor Manufacturing
    Dorint-Hotel Berlin-Adlershof
    Berlin, Germany
    November, 2010
    plasmetrex.com/plasmaschool.html,courses
    depending on request

  • Plasma School for Photovoltaic Manufacturing
    Dorint-Hotel Berlin-Adlershof
    Berlin, Germany
    November, 2010
    plasmetrex.com/plasmaschool_pv.html,courses
    Sold out, new dates on request

  • SEMICON Japan 2010
    Makuhari Messe, Chiba, 
    December, 2010
  • Dr. Michael Klick "Plasmatechnik in der Halbleiter- und Mikrosystemtechnik
    Lecture at Ruhr-University Bochum

  • European Advanced Equipment Control /
    Advanced Process Control (AEC/APC) Conference,
    Hotel Sheraton Catania, Sicily - Italy,
    April 28-30, 2010
    www.aecapc-europe.com
  • AVS 56th International Symposium & Exhibition,
    San Jose Convention Center
    San Jose, California, USA
    November 8 - 13, 2009
    www.avs.org/
    • Monday Morning, November 9, 2009
      Plasma Science and Technology
      Room: A8 - Session PS2-PV-MoM, 9:20 am
      M. Klick, L. Eichhorn, R. Rothe
      "Novel Model-Based Sensor for Thin Film Deposition on Large Area Substrates"
    • Thursday Afternoon Poster Sessions, November 12, 2009
      Plasma Science and Technology
      Room: Hall 3 - Session PS-ThP
      Plasma Science Poster Session, 6:00 pm
      PS-ThP2 M. Klick
      "Semi-analytical Model of Standing Waves and Skin Effect in Large-area RF Discharges"

  • 24th European Photovoltaic Solar Energy Conference and Exhibition
    Hamburg, Germnay
    September, 21-24, 2009
    www.photovoltaic-conference.com/

  • 4. Silicon Saxony Day
    Dresden, Germany
    May 12-13, 2009
    www.silicon-saxony.de
  • Photovoltaics Thin-Film-Week
    Second International Workshop on Thin-Film Silicon Solar Cells IWTFSSC-2
    M. Klick
    Plasma Process Control with Model Based Sensors in Manufacturing

    Berlin, Germany
    April 21-23, 2009
    www.helmholtz-berlin.de

    Please contact us for more information.

If you would like to arrange a meeting at a exhibition or conference
with an Plasmetrex representative please let us know.

We look forward to meeting you soon!