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PRODUCT GUIDE
Hercules® at a Glance
Semiconductor Plasma Process Sensor
Consulting Overview
Total Process Control Solution
PLASMA PROCESS CONTROL
Plasma Control Concept
Plasma Metrology
Data Handling
EXPERIENCE & TRAINING
Training Concept
Plasma School
RF TECHNOLOGY and PROCESS SERVICES
RF Chamber Matching
Spare Part Management
Uniformity Improvement
Large Area Uniformity Simulation
REFERENCES
Tool and Process
Hercules® Customers
Experience & Training
Partners
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2016 © Plasmetrex GmbH

COMPANY

Plasmetrex GmbH offers customized services to suit all your requirement!

Our strengths lie in the expert advice and individual support we can offer.
We strive continuously to find optimal solutions for your specific needs.
We see ourselves not only as a manufacturer and supplier of plasma diagnostics,
but also as a service provider and problem solver around the subject 'plasma'.

The ASI Advanced Semiconductor Instruments GmbH were taken over by the Plasmetrex GmbH per October 1st 2006.

Business segments

  • Plasma metrology equipment for etch and deposition in semiconductor manufacturing - High-end plasma metrology
  • Photovoltaic and display manufacturing - Large chamber plasma control
  • Surface treatment - Low cost plasma control

Service and consulting

  • Qualification of process and maintenance personnel
    • 'Plasma School for Semiconductor Manufacturing'
    • 'Plasma Technology in Solar Cell Manufacturing'
    • 'Radio Frequency Technology for Plasma Applications'
  • Process, equipment, and metrology consulting
    • RF chamber matching
    • Uniformity improvement
    • Non-uniformity simulation for a-Si layer thickness
Business Segments