The APPLICATION GUIDE supports your everyday work with Hercules® and plasma etch and deposition processes.
Troubleshooting is best approached from a process point of view. Process problems may be indicated by test wafers, CDs, yield, or plasma parameters deviations.
|PROCESS FAULT - WHAT NOW?||CONDITIONING GUIDE|
your top-down analysis starting at a rough pre-selection on wether the
issue occurs on:
guide will show you
the advantages of
using plasma parameters for the chamber conditioning and give
suitable application examples.
It will help you to efficiently perform the conditioning and matching procedure and properly respond to problems.
For additional questions or other problems, please contact Plasmetrex headquarters by:
phone: +49 30 63 92 50 44
To find your local representative, please visit: Contact us.