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Topic - Maintenance

Title Processes Material Chamber Principle Chamber Hardware Supplier Topic  
Arcing in gas distribution  MERIEMxPAMATMaintenance
Magnetic field failure  MERIEMxPAMATMaintenance
Etch rate depends on matchbox  MERIEMxP+AMATMaintenance
Arcing indicated by collision rateHard Mask OpenOxide Nitride SandwichDual FrequencySCCM OxideTELMaintenance
Increased first wafer effect after PM from chamber heatingStackNitride / OxinitrideDual FrequencySCCM OxideTELMaintenance