Plasma Control in Semiconductor and Solar Cell
Manufacturing
Our strengths lie
in the
expert advice and individual support.
We strive continuously to find optimal solutions for
your specific
needs.
We see ourselves not only as a manufacturer and
supplier of plasma metrology, but also as a service provider and
problem solver
around
the subject 'plasma'. more
Semicon Japan
Makuhari Messe, Tokyo
December 7 - 9, 2011
Semicon Korea
COEX, Seoul, Korea February 7 - 9, 2012
New
Products
Photovoltaics
Plasma Process Sensor
Thin film processing, as
hydrogenated amorphous silicon (α-Si:H), silicium nitride (Si3N4),
and silicium oxide (SiO2) is very sensitive to
temperature, chamber clean, and seasoning.
more
Plasma Metrology System Hercules®N60
New Services
SMART SPARE PART MANAGEMENT by PLASMETREX' Hercules® and SAPC
Server
Any part in contact with the plasma impacts the
process.
Spare parts are a major cost driver. more
After PM
Before PM
Large area
uniformity
simulation for a-Si layer thicknes
The uniformity of the plasma is determined through three major effects. more
Measured a-Si layer thickness
Simulation
Hercules®
PMX 500/1000
Hercules®
C 500/1000
Hercules®
N 250
Process
Control
Plasma
Key Parameters
Hercules® Product
Hercules® Principle
Hercules® Sensors
Main
Applications
Hercules® Rent-to-buy
Hercules® Road Map and History
Data
Analysis by HercViewer or HercLotViewer
Data
Coupling
Data
Management by Hercules®
Master
Hercules® APPLICATION GUIDE
Hercules® APPLICATION DATA
BASE
Plasma
School for Semiconductor Manufacturing
Plasma
Technology in Solar Cell Manufacturing
Radio
Frequency Technology for Plasma Applications
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